New 300mm prototype @ imec for 7nm
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RECIF delivers its new 300mm prototype to imec for 7nm
RECIF Technologies delivered its first G5+ wafer sorter prototype in June 2015.
This installation in the clean room of the imec (Interuniversity Micro Electronics Centre) based in Leuven (Belgium), took place in the frame of the "SeNaTe" (Seven Nanometer Technology) European collaborative project, aiming at demonstrating the integration of 7nm IC technology, using the imec pilot line.
The contribution of RECIF within the project is to support the advanced patterning, with state of the art wafer sorter platform prototype, and demonstrate its leading edge cleanliness in terms of particles and metal contamination.
Thanks to this project, RECIF will prove its compliance with the industrial expectations, required for the manufacturing of the most advanced nodes (7nm and beyond).
Leading edge cleanliness will provide IC manufacturers with a clear advantage in terms of yield management, and make of RECIF the partner of choice for their manufacturing.
Acknowledgements:
The activities of RECIF Technologies within this project are supported by ECSEL Joint Undertaking as well as the French ministry of industry "Direction Générale des Entreprises".
For more information, please contact your regular RECIF representative or send a mail to [email protected]
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