Batch Slide Transfer
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AWT150/200 performs automated direct carrier to carrier transfer. The transfer arm kinematics are designed to keep PWP to a minimum. Carrier detection ensures that carriers are correctly positionned prior to transfer. The tool is compatible with high & low profile carriers.
MWT150/200 performs manual direct carrier to carrier transfer. MWT is designed to be cost competitive whilst utilising clean concept materials for wafer contact. The tool is compatible with high & low profile carriers.
