Batch Wafer Transfer
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The BPP tool family is a tabletop tool that uses a vacuum free technology to pick wafers from one cassette and place into another while minimizing friction with the slots of the cassette.
The transfers are performed by a batch transfer arm, which enables the wafers to be handled safely via a linear contact on the rear side of the wafer.
The tools which are made of Aluminium provide true ESD protection, and are compatible with all SEMI standard cassettes.
- 6 or 8’’ wafer capability
- Single or double stage frame
- Automated mapping upon loading of one or two cassettes in order to detect the position and status of the wafers within the cassette, empty, single, double or cross slot.
- Carrier geometry analysis
- User friendly interface to run the cycle
- Vacuum free horizontal transfers with linear contact along the rear side of the wafers.
- Limited linear contact on the back side
- Continuous wafer status/position monitoring by optical sensors throughout the cycle.
- Optional carrier tilter available.
- Optional double arm to dedicate them to 2 different wafer categories, and avoid cross contamination.
