Notch Aligner
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The automated notch finders - ANF allow a batch alignment of wafers to any angle. They are compatible with SEMI standard cassettes. The systems are equipped with a micro-controller and flexible software, a user friendly keyboard and LCD screen allowing a full time communication with the operator.
The notch finders are made of clean organic materials and provide true ESD protection. A unique Recif surface treatment for all parts ensures a rugosity level (Ra) of 0.3mm.
The open design minimizes disturbance of the laminar flow.
- Thanks to two driving roller kinetics, the wafers are centered on the back face to minimize rubbing within the cassette slots and interference with the active face.
- Easy angle selection through keyboard (All clock hours Automatic start upon positioning of cassette.
- Precise alignment of wafers to ± 1° (PID software).
- Buzzer to indicate end of cycle.
