Notch Aligner Elevator
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The Notch Finder Elevator - NFE is designed to selectively present wafers for in-line process inspection. The NFE incorporates a pre-notch alignment to position wafers at a desired angle and then elevates all wafers at a slope to visually read scribes and/or inspect wafers. This system is compatible with SEMI standard cassettes.
This wafer elevator is made of clean organic materials and provides true ESD protection. Two types of lighting are available (red led and Neon light)
A unique Recif surface treatment for all parts ensures a rugosity level (Ra) of 0.3µm. The open design minimizes disturbance of the laminar flow.
- Automatic alignment upon positioning of cassette
- Two pre-programmed angles are available: 6:00 (bottom alignment) and 12:00 (top alignment.
- Top alignment angle can be changed to any other desired angle. Thanks to a micro-controller this modified angle will automatically be memorized.
- Precise alignment of wafers to +/- 1° (DC motor with encoder and PID software).
- Minimum contact on exclusion edge during the elevation only to allow a safe scribe read and/or wafer inspection
