Single Wafer Transfer
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The SPP tool family is a tabletop tool that uses a vacuum free technology to pick and place wafers from one cassette to another or within a same cassette while minimizing friction with the slots of the cassette.
The transfers are performed by a mono transfer finger, which enables the wafers to be handled safely via a linear contact on the rear side of the wafer.
Its new design provides true ESD protection, and is compatible with all SEMI standard cassettes.
- Available for 6” or 8” wafers.
- Automated mapping upon loading of one or two cassettes in order to detect the position and status of the wafers within the cassettes, empty, single, double or cross slot.
- Carrier geometry analysis.
- Clear display of the mapping results on an LCD screen.
- Pre-programmed automated transfer options such as split, merge, compression, randomization and block wafer transfers.
- Membrane keypad for program selection.
- Vacuum free horizontal transfers with linear contact along the rear side of the wafers.
- Continuous wafer status/position monitoring by optical sensors throughout the cycle.
- Carrier Tilter available
