RECIF Technologies

Non-SMIF Sorter

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SPP200D_Pge_Pdt
SPP200D_Pge_Pdt

 

The architecture of the SPP200D is based on Recif Technologies leading edge 300mm wafer sorter. SPP200D, 200mm non-SMIF sorter uses our patented transfer technology providing vacuum free embedded wafer alignment and ID reading.

 

Recif Technologies SPP200D provides:

  • Vacuum-free edge contact wafer handling
  • A continuous transfer monitoring, for wafer safety.
  • A specific design allowing a greater access to carrier positions
  • Low Total Cost of Ownership thanks to minimal footprint

 Our non-SMIF 200mm wafer sorter offers :

  • Up to 400 wph through put
  • ID read
  • Automated mapping
  • 3 carrier positions (POD)
  • Cassette tilter
  • PWP < 0.03 @0.14μ on active & back wafer surfaces
  • Standard and configurable process programs
  • Colour LCD touchscreen or Host operation mode
  • Full SECS/GEM compliance
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