RECIF Technologies

SMIF Sorter

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The architecture of the SPP200S is based on Recif Technologies leading edge 300mm wafer sorter. SPP200S, 200mm SMIF sorter uses our patented transfer technology providing vacuum free embedded wafer alignment and ID read.

 

Recif Technologies SPP200S provides:

  • Vacuum-free edge contact wafer handling
  • A continuous transfer monitoring, for wafer safety.
  • A specific design allowing a greater access to carrier positions for manual or automated loading.
  • Low Total Cost of Ownership thanks to minimal footprint

Our SMIF 200mm wafer sorter offers :

  • Up to 400 wph through put*
  • ID read
  • Automated mapping
  • 3 carrier positions (POD)
  • SMIF mini-environment
  • PWP < 0.03 @0.14μ** on active & back wafer surfaces
  • Standard and configurable process programs
  • Host operation mode
  • Color LCD touch screen
  • Full SECS/GEM compliance
  • Adjustable laminar flow velocity
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