Batch transfer system
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Recif Technologies BPP300 is a 2 Load ports 300mm wafer sorter allowing wafer batch transfer.
This equipment provides a highly safe and clean solution for all your batch transfer operations thanks to :
- our patented edge contact technology allowing vacuum-free wafer transfer
- a continuous wafer presence monitoring.
Based on Recif Technologies design, this equipment offers a high throughput within an optimized footprint to guarantee the best Total Cost of Ownership.
This equipment is a real time saving solution for your batch transfer operations with a throughput up to 2800 w/h.
Recif Technologies BPP300 offers
- PWP < 0.03 @ 90 nm on active wafer surface
- Class 0.1 mini-environment
- Full SECS/GEM compliance
- Compatibility with all current semi FOUP types
- Automated hidden time mapping
- Remote mode control through host & local mode control through LCD touchscreen
- Numerous options such as Ionizers or rotary load ports...
