RECIF Technologies

Bright Light Module

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Recif Technologies BLM300 is a Bright light Metrology module which can be placed directly on the load port of any compatible 300mm wafer sorter or process tool.

Used in automatic or manual mode, three dedicated light sources enable the operator to inspect the wafer surface for colour uniformity, particles & scratches.

Compatibility with all relevant SEMI Standards provides a flexible, low cost wafer surface inspection system.

 

BLM300 bright light metrology module offers:

  • Vacuum-free edge contact wafer handling
  • Diffusion lighting for colour uniformity
  • Low angle lighting for particle detection
  • High intensity lighting for scratch detection
  • Field programmable for automated cycling
  • Keypad for full manual control
  • Nominal throughput upto 30 wph
  • OHT compatibilty
  • PWP < 0.035 @0.9μm
  • Full compatibility with Recif 300mm wafer sorter
  • Low Total Cost of Ownership
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