RECIF Technologies

Embedded into FOUP stocker

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ESR300T_Pdt2
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ESR300T_Pdt2

Recif Technologies ESR300 is a stocker integrated 300mm sorter. This equipement has been designed to be compatible with all main stockers on the market.

The ESR300 stocker integrated sorter is providing :

  • Vacuum-free edge contact or 3 points backside contact wafer transfer
  • Alignment and OCR device. Embedded on the end-effector these devices warranty high throughput.
  • Low Total Cost of Ownership thanks to optimized foot-print & minimal facility requirements

This sorter is available in 2, 3 or 4 Load ports configuration

Recif technologies G3plus stocker integrated sorter offers:

  • PWP < 0.03 @ 90 nm on active wafer surface
  • Class 0.1 mini-environment
  • Throughput up to 500 wph
  • SEMI300 standards compliance
  • Standard & configurable process programs
  • Compatibility with all SEMI compliant FOUP / FOSB types
  • Automated hidden time mapping
  • Remote mode control through host & local mode control through LCD touchscreen
  • Numerous options such as Ionizers or rotary load ports...
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