RECIF Technologies

Stand alone

Print
SRT300F_Pdt
More views
SRT300F_Pdt

Recif Technologies SRT300 is a stand alone 300mm wafer sorter providing

  • Vacuum-free edge contact or 3 points backside contact wafer
  • Alignment and OCR device. Embedded on the end-effector these devices warranty high throughput.
  • Low Total Cost of Ownership thanks to optimized foot-print & minimal facility requirements

This stand-alone sorter is available in 2, 3 or 4 Load ports configuration

 

Recif technologies G3plus stand alone sorter offers:

  • PWP < 0.03 @ 90 nm on active wafer surface
  • Class 0.1 mini-environment
  • Throughput up to 500 wph
  • SEMI300 standards compliance
  • Standard & configurable process programs
  • Compatibility with all SEMI compliant FOUP / FOSB types
  • Automated hidden time mapping
  • Remote mode control through host & local mode control through LCD touchscreen
  • Numerous options such as flip function and Ionizers
Request Information
Back to top