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The new RECIF Technologies G5 300mm stand alone wafer sorter, RTS300 is providing IC manufacturers with the highest productivity solution.
Its new motorization and cinematic enables the highest throughput ever achieved with a single robot, in the smallest footprint.
The RTS300 is equipped with the RECIF Technologies patented End-Effector, proposing OCR and alignment embedded on the arm.
This back side contact End-Effector ensures unsurpassed cleanliness, as well as a high secure wafer handling through our patented ACT (Advanced Contact Technology) resulting from a 2 years Research & Development program.
Our revolutionary design will support you at each step of your manufacturing improvement.
G5 300 stand alone wafer sorter offers:
- 2 or 4 Load Ports configuration
- End-Effector: 3 points backside Advanced Contact Technology
- New controller
- Patented embedded alignment & ID reading on the finger
- Standard & configurable process programs
- Automated hidden time mapping
- Remote mode control through host & local mode control through LCD touchscreen
- PWP front face < 0,02 @ 40nm ;< 0,015 @ 90nm ; < 0,010@135nm
- PWP back face < 2 @ 90 nm
- Class 0.1 mini-environment
- Throughput up to 550 wph
- SEMI300 standards compliance
- Compatibility with all SEMI compliant FOUP / FOSB types
- Low Total Cost of Ownership
