FLM300 wafer sorter/buffer
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The FLM300 is a synergy tool proposing the word-widely acknowledged RECIF sorting solutions, together with a bare wafer buffer. This breakthrough concept proposes a safe and reliable way to drastically reduce the AMHS fab running costs.
- G5 sorter based architecture
- Integrable as a wafer sorter in your fab (HW / SW)
- Enables multiple buffer areas inside the Fab
- Minimized risk Vs Higher capacity storage device
- Generates direct savings
- 300 wafers storage capability
- 350 wph mean throughput
- Simple, clean and robust design
- Incorruptible wafer storage data base
- No moving part next to wafer storage area
