COMPACT 300mm Wafer Sorter

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COMPACT footprint & Clear-cut handling

COMPACTG5+ is the standard solution for 300mm mainstream silicon wafers sorting. Its inovative design allows a footprint reduction of up to 40% less1


It offers fast throughput with the alignment/OCR function embedded on the handling robot. End Effector design features ensure optimized cleanliness, as well as a highly secure wafer handling through our ACT (Advanced Contact Technology).


Its industry leading robustness, flexibility and ease of maintainability, coupled with the smallest footprint and highest throughtput in a single robot sorter, provides IC manufacturers the ultimate productivity solution up to 2nm.

 

Main features:


  • Optimized cleanliness
  • Vacuum Free Contact
  • Peerless footprint
  • SEMI300 standards compliant
  • 2 or 4 Load Ports configuration
  • Integration into stocker (2 or 4 LP)
  • Low cost of ownership
  • Standard & configurable process programs
  • Compatible with all SEMI compliant FOUP/ FOSB types
  • Automated hidden time mapping
  • Carrier mapping 3D

 

* Based on 1000 cycles test per wafer - Tool configuration, clean room environment and FOUP/ FOSB type to be defined

1 Compared to the average market offer with equivalent load port configuration


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