COMPACT 300mm Wafer Sorter
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COMPACT footprint & Clear-cut handling
COMPACTG5+ is the standard solution for 300mm mainstream silicon wafers sorting. Its inovative design allows a footprint reduction of up to 40% less1
It offers fast throughput with the alignment/OCR function embedded on the handling robot. End Effector design features ensure optimized cleanliness, as well as a highly secure wafer handling through our ACT (Advanced Contact Technology).
Its industry leading robustness, flexibility and ease of maintainability, coupled with the smallest footprint and highest throughtput in a single robot sorter, provides IC manufacturers the ultimate productivity solution up to 2nm.
Main features:
- Optimized cleanliness
- Vacuum Free Contact
- Peerless footprint
- SEMI300 standards compliant
- 2 or 4 Load Ports configuration
- Integration into stocker (2 or 4 LP)
- Low cost of ownership
- Standard & configurable process programs
- Compatible with all SEMI compliant FOUP/ FOSB types
- Automated hidden time mapping
- Carrier mapping 3D
1 Compared to the average market offer with equivalent load port configuration
Sneak peek:
