EFEM 380mm frames
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Plug & Play Solution for Emerging Technologies & Fast Wafer swap
SMART EFEM is our plug & play solution for emerging manufacturing technologies: Advanced-Packaging, 3D-IC, TSV... Equipped with our vacuum free 1 ACT end-effector, the SMART EFEM ensures a spotless handling.
Enables the automated loading of 380mm wafer on frame into metrology and process chucks with RECIF equipments' high performance.
Main features:
- Plug & play handling solution
- Software application compatible with main controllers' framework
- Barcode and RF Frame ID reader
- Backside Advanced Contact Technology
- ISO Class 1 mini-environment
- Leading edge cleanliness performance (particle / ion-metal / AMC)
- SEMI standards compliant: G74 (metal tape frame), G87 (plastic tape frame)
- 2, 3 or 4 Load Ports configuration
- Compatible with all SEMI compliant Frame cassettes with 300mm kinematic couplings (SEMI G77), and upcoming frame FOUPs
1 Advanced Contact Technology
