SMART Sorter 300mm advanced substrates
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Emerging Technologies empowered by modular design !
SMART Sorter 300mm is our versatile solution for emerging manufacturing technologies: Advanced-Packaging, 3D-IC, TSV... Equipped with our ACT1 end-effector, the SMART ensures a spotless handling
Main features:
- Heterogeneous handling: silicon, stacked, glass, mold compound, warped wafers
- Dual handling option: end-effector & aligner
- Backside Advanced Contact Technology
- Front side and backside wafer ID readers
- ISO Class 1 mini-environment
- SEMI 300 standards compliant
- 2, 3 or 4 Load Ports configuration
- Compatible with all SEMI compliant FOUP/ FOSB types
1 Advanced Contact Technology
Sneak peek:
