RECIF Technologies

Sorter 380mm frames

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Sorter380_web1
Sorter380_web1

RECIF Technologies SMART sorter is a product powered by the SMART platform concept to address the challenges raised by new applications such as 3DIC and advanced packaging.

 

 

Main features :

  • Compatible with 300mm wafers mounted on 380mm frames
  • Single end effector
  • Backside Advanced Contact Technology
  • Barcode and RF frame ID readers
  • ISO Class 1 mini-environment
  • SEMI standards compliant : G74 (metal tape frame), G87 (plastic tape frame)
  • 2 or 3 Load Ports configuration
  • Compatible with SEMI compliant Frame cassettes with 300mm kinematic couplings (SEMI G77), and with upcoming Frame FOUPs

 

 

Introduction of SMART sorter is to be announced soon.

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