Sorter 450mm advanced substrates
PrintRECIF Technologies SMART sorter is a product powered by the SMART platform concept to address the challenges raised by new applications such as 3DIC and advanced packaging.
Main features :
- Compatible with standard silicon wafers, 3DIC (TSV / glass / stacks) & FO-WLP (mold compound / warped wafers)
- Compatible with 450mm wafers
- Dual end effectors & dual aligners capability
- Backside Advanced Contact Technology
- Front side and backside wafer ID readers
- ISO Class 1 mini-environment
- SEMI 300 standards compliant
- 2 or 3 Load Ports configuration
- Compatible with all SEMI compliant FOUP/ FOSB types
Introduction of SMART sorter is to be announced soon.