G5+ 300mm

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The G5+ series is the latest generation of 300mm wafer sorters from RECIF technologies. Its innovative design offers a soft breakthrough thanks to its field proven modules and technologies such as real time filed bus, direct drive transmission and many other technical advances.

 

The G5+ offers fast throughput thanks to the alignment/OCR function embedded on the handling robot. End Effector design features ensure unsurpassed cleanliness, as well as a highly secure wafer handling through our proprietary ACT (Advanced Contact Technology).

 

It offers a new benchmark in terms of cleanliness, robustness, flexibility and maintainability. It also provides the highest throughput ever achieved with a single robot, the smallest footprint and unsurpassed cleanliness demonstrated, as well as extremely secure wafer handling.

 

The RECIF Technologies G5+ 300mm Wafer Sorter is providing IC manufacturers the ultimate productivity solution for 10 nm nodes and beyond.

 

The G5+ sorter offers:

  • Advanced PWP front face performance < 0.0049 @ 26nm*
  • End effector: 3 points backside Advanced Contact Technology as standard configuration
  • New industrial controller
  • ISO Class 1 mini-environment
  • SEMI300 standards compliant
  • 2 or 4 Load Ports configuration
  • Integration into stocker (2 or 4 LP)
  • Low cost of ownership
  • Standard & configurable process programs
  • Compatible with all SEMI compliant FOUP/ FOSB types
  • Automated hidden time mapping
  • New side casing for optional handling features

 

* Based on 1000 cycles test per wafer - Tool configuration, clean room environment and FOUP/ FOSB type to be defined

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