MC12

Print

 

 

RECIF Technologies MC12 - 300mm metal cassettes offers solutions for thermal processes applications. Made of a special aluminium alloy (Fortal HR), they guarantee high mechanical performances with an optimized weight. A very hard and thick anodization of Al2O3 is grown onto the Fortal HR to prevent scratches and metal contamination.

  • High back plate for wafer protection
  • Up to 400°c process compliant
  • Ergonomic handles for ease of use and prevent contamination
  • Minimized wafers masking
  • WDH (mm) = 412 x 312 x 339
  • Standard or light design
  • Weight = 4.814 KG (light) / 5.616 KG (standard)
  • ESD Protection
  • Optional "anti-drop system" (= 216 G) to maintain wafers inside the cassette in tilted position
  • Available in 13 slots version.
Back to top