Reticle Handling & Inspection
Print
The architecture of the SPR is based on RECIF Technologies sorters technology. It comprises a Cartesian robot inside a ISO Class 1 mini-environment, delivered by SMIF pod openers.
This provides a safe & clean reticle handling solution, compared to manual operations to transfer reticles from single shipping box (coming from Mask shop) to SMIF Pods (to be used on scanners/steppers).
The innovative Bright Light Inspection system is based on high powered LED’s and offers 3D axis full rotation capability. It is operated via joystick.
Operated via a touch sreen, the SPR will fasten the regular manual operations as well as extending the reticle life time:
Equipment main advantages:
- eradicates the risk of manual mis-handling
- offers fast and safe transfer solutions (pod-to-pod or box-to-pod)
- simplifies and fasten the macro-inspection operations
- very high level of reticle safety during the operations (embedded sensors)
- field proven dry cleaning system offers a High Particle Removal efficiency
- continuous ESD event prevention thanks to ionization
