MC12
PrintErgonomic solution for thermal processes applications
Made of a special aluminium alloy, they guarantee high mechanical performances with an optimized weight. A very hard and thick anodization is grown onto the Fortal HR to prevent scratches and metal contamination.
- Available in 25 or 13 slots version
- High back plate for wafer protection
- Up to 400°c process compliant
- Ergonomic handles for ease of use and prevent contamination
- Minimized wafers masking
- ESD Protection
- "anti-drop system" to maintain the cassette in tilted position
- Optional enhanced locking device
- Compliant with SEMI E1.9 standard kinematic coupling (E57) and infopads usage