Ergonomic solution for thermal processes applications


Made of a special aluminium alloy, they guarantee high mechanical performances with an optimized weight. A very hard and thick anodization is grown onto the Fortal HR to prevent scratches and metal contamination.


  • Available in 25 or 13 slots version
  • High back plate for wafer protection
  • Up to 400°c process compliant
  • Ergonomic handles for ease of use and prevent contamination
  • Minimized wafers masking
  • ESD Protection
  • "anti-drop system" to maintain the cassette in tilted position
  • Optional enhanced locking device
  • Compliant with SEMI E1.9 standard kinematic coupling (E57) and infopads usage






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