Batch Slide Transfer
Print![emu_AWT_web](/uploads/thumbnails/uploads/assets/emu_AWT_web_294x294.jpg)
![emu_AWT_web](/uploads/thumbnails/uploads/assets/emu_AWT_web_294x294.jpg)
AWT150/200 performs automated direct carrier to carrier transfer. The transfer arm kinematics are designed to keep PWP to a minimum. Carrier detection ensures that carriers are correctly positionned prior to transfer. The tool is compatible with high & low profile carriers.
MWT150/200 performs manual direct carrier to carrier transfer. MWT is designed to be cost competitive whilst utilising clean concept materials for wafer contact. The tool is compatible with high & low profile carriers.