SMART EFEM / sorter
PrintEmerging Applications empowered by Modular Design
The SMART Sorter / EFEM is the result of collaborative projects led by RECIF Technologies to support emerging applications. It addesses the challenges raised by new technologies such as 3D IC and Advanced Packaging, requiring more flexibility. Adopting a modular approach, a common robotics core is interfaced with several loading stage and end effector. The SMART products are available in Sorters and EFEMs, for 300 & 450mm wafers & 380mm wafers on frame.
