Sorter 380mm frames
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RECIF Technologies SMART sorter is a product powered by the SMART platform concept to address the challenges raised by new applications such as 3DIC and advanced packaging.
Main features :
- Compatible with 300mm wafers mounted on 380mm frames
- Single end effector
- Backside Advanced Contact Technology
- Barcode and RF frame ID readers
- ISO Class 1 mini-environment
- SEMI standards compliant : G74 (metal tape frame), G87 (plastic tape frame)
- 2 or 3 Load Ports configuration
- Compatible with SEMI compliant Frame cassettes with 300mm kinematic couplings (SEMI G77), and with upcoming Frame FOUPs
Introduction of SMART sorter is to be announced soon.