Sorter 450mm advanced substrates


RECIF Technologies SMART sorter is a product powered by the SMART platform concept to address the challenges raised by new applications such as 3DIC and advanced packaging.



Main features :

  • Compatible with standard silicon wafers, 3DIC (TSV / glass / stacks) & FO-WLP (mold compound / warped wafers)
  • Compatible with 450mm wafers
  • Dual end effectors & dual aligners capability
  • Backside Advanced Contact Technology
  • Front side and backside wafer ID readers
  • ISO Class 1 mini-environment
  • SEMI 300 standards compliant
  • 2 or 3 Load Ports configuration
  • Compatible with all SEMI compliant FOUP/ FOSB types



Introduction of SMART sorter is to be announced soon.

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