EFEM 380mm frames


Plug & Play Solution for Emerging Technologies & Fast Wafer swap

SMART EFEM is our plug & play solution for emerging manufacturing technologies: Advanced-Packaging, 3D-IC, TSV... Equipped with our vacuum free 1 ACT end-effector, the SMART EFEM ensures a spotless handling.


Enables the automated loading of 380mm wafer on frame into metrology and process chucks with RECIF equipments' high performance.


Main features:

  • Plug & play handling solution
  • Software application compatible with main controllers' framework
  • Barcode and RF Frame ID reader
  • Backside Advanced Contact Technology
  • ISO Class 1 mini-environment
  • Leading edge cleanliness performance (particle / ion-metal / AMC)
  • SEMI standards compliant: G74 (metal tape frame), G87 (plastic tape frame)
  • 2, 3 or 4 Load Ports configuration
  • Compatible with all SEMI compliant Frame cassettes with 300mm kinematic couplings (SEMI G77), and upcoming frame FOUPs

1 Advanced Contact Technology



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